- Process gas available
- Vacuum
- With high frequency generator
- Painting / Plating
- Adhesion / Bonding
- Cultivation / Dental Care
- Cleaning / Sterilization
- Etching
- Thin film formation
- Hydrophobic
- Plasma durability test
- Lipophobic / Stain repellency (under development)
- Lipophilic (under development)
- For experimental use
Plasma Etcher CPE-B Series
Usage
■Hydrophilization of PTFE (Teflon) (NH3 required)
■Water repellent treatment of various materials (CF4 required)
■Etching of silicon film (substrate) (CF4 required)
■Formation of glass film (substrate) (bubbler required)
■Processing into cell culture vessels〈Features〉
■All control conditions are manual operation specifications
→ for researchers who are accustomed to handling plasma devices!
■Can be incorporated into the manufacturing process at the production site
Since it can be used together with existing equipment →, cost, time, and manufacturing efficiency are also improved.
■ Simple and low introduction cost range
Achieved sales of products at lower prices through the efforts of → companies
Model CPE-100B Specifications
External dimensions 392mm(W)×500mm(D)×1050mm(H) (excluding protrusions) When the top lid is closed)
Stage dimensions Diameter 100mm
Processing pressure adjustment Manual adjustment by manual exhaust valve and gas introduction volume
Vacuum gauge analog display Pirani vacuum gauge
1 gas system
Power supply Single phase 100V, 15A (50Hz/60Hz) model CPE-400B
External dimensions 850mm(W)×900mm(D)×1050mm(H) (excluding protrusions) When the top lid is closed)
Stage dimensions Diameter 400mm
Processing pressure adjustment Manual adjustment by manual exhaust valve and gas introduction volume
Vacuum gauge analog display Pirani vacuum gauge
1 gas system
Power supply: Single phase 100V, 30A (50Hz/60Hz)
Model CPE-1000B Specifications
External dimensions 1600mm(W)×1600mm(D)×1100mm(H) (excluding protrusions) When the top lid is closed)
Stage dimensions Diameter 1000mm
Processing pressure adjustment Manual adjustment by manual exhaust valve and gas introduction volume
Vacuum gauge analog display Pirani vacuum gauge
1 gas system
Power supply: Single phase 200V, 30A (50Hz/60Hz)
* Vacuum pump is sold separately. We also accept specification changes separately.