• Process gas available
  • Vacuum
  • With high frequency generator
  • Painting / Plating
  • Adhesion / Bonding
  • Cultivation / Dental Care
  • Cleaning / Sterilization
  • Etching
  • Thin film formation
  • Hydrophobic
  • Plasma durability test
  • Lipophobic / Stain repellency (under development)
  • Lipophilic (under development)
  • For experimental use
  • For manufacturing

Plasma Etcher Semi-Auto Series CPE-S Series

Hydrophilization of PTFE (Teflon). Water repellent treatment of various materials. Formation of a glass film. etc

Product Overview

■ A new affordable semi-automatic series is now available in the plasma device CPE series!
■ In addition to manual operation, easy operation by touch panel
By registering recipes in advance, semi-automatic operation is possible with the push of a button.
■φ300mm large area (size change is also available)


Device name: Semi-automatic plasma device
Model CPE-300S
External dimensions 680mm(W)×785mm(D)×1020mm(H)
Discharge part size diameter 300mm (round)
Weight 160kg
Output adjustment Yes
Gas system: 1 system (2 lines optional)
Gas Control Method Mass Flow Controller
Pressure regulating valve
Power supply AC100V, 30A(50Hz/60Hz)