- Process gas available
- Vacuum
- With high frequency generator
- Painting / Plating
- Adhesion / Bonding
- Cultivation / Dental Care
- Cleaning / Sterilization
- Etching
- Thin film formation
- Hydrophobic
- Plasma durability test
- Lipophobic / Stain repellency (under development)
- Lipophilic (under development)
- For experimental use
- For manufacturing
Plasma Etcher Semi-Auto Series CPE-S Series
Hydrophilization of PTFE (Teflon). Water repellent treatment of various materials. Formation of a glass film. etc
Product Overview
■ A new affordable semi-automatic series is now available in the plasma device CPE series!
■ In addition to manual operation, easy operation by touch panel
By registering recipes in advance, semi-automatic operation is possible with the push of a button.
■φ300mm large area (size change is also available)
Specification
Device name: Semi-automatic plasma device
Model CPE-300S
External dimensions 680mm(W)×785mm(D)×1020mm(H)
Discharge part size diameter 300mm (round)
Weight 160kg
Output adjustment Yes
Gas system: 1 system (2 lines optional)
Gas Control Method Mass Flow Controller
Pressure regulating valve
Power supply AC100V, 30A(50Hz/60Hz)